PHI 710 Scanning Auger Nanoprobe

DOI: https://doi.org/10.25957/flinders.aes.phi710

The PHI Model 710 Scanning Auger Nanoprobe system utilizes Auger Electron Spectroscopy (AES) to provide elemental, surface, topographic, bulk chemical and interfacial analysis. Auger Electron Spectroscopy is an analytical method which uses Auger electrons emitted from material surface to obtain elemental and composition data. Due to the short mean free path of the liberated electrons, the escape depth of the Auger electron is a ~10nm and therefore is a surface sensitive technique.

This instrument is equipped with a secondary electron detector, allowing for correlation between surface features and elemental composition. By focussing the electron beam, compositional information can be resolved spatially to within 8nm, enabling elemental mapping. Through the use of an Argon ion gun, depth profile analysis is also able to be performed.

The instrument operates under ultra-high vacuum, with the analysis chamber routinely achieving base pressures better than 5 × 10-9 Torr. The nature of the technique and ultra-high vacuum operational conditions requires that samples are dry, solid and conductive. Sample dimensions up to 50 mm × 50 mm × 20 mm can be accommodated.

Data collection and preliminary analysis is conducted using SmartSoft-AES version 5.7.0.11 (32-bit). Data processing and visualisation is conducted in PHI’s MultiPak version 9.5.0.8

Instrument Specifications:
-Field Emission Electron Source
-Secondary Electron detector
-Cylindrical Mirror Electron Energy Analyser (reduces shadowing)
-Argon Ion sputter source (10kV – 5000kV)