Atomic layer deposition of SiO2 on porous alumina membranes: controlling the pore size and transport properties

Leonora Velleman, Gerry Triani, Peter J. Evans, Armand Atanacio, Joe G. Shapter, Dusan Losic

Research output: Contribution to journalConference articlepeer-review

3 Citations (Scopus)

Abstract

Atomic layer deposition (ALD) of SiO2 onto nanoporous alumina (PA) membranes was investigated with the aim of adjusting the pore size and transport properties. PA membranes from commercial sources with a range of pore diameters (20 nm, 100 nm and 200 nm) were used and modified by atomic layer deposition using tris(tert-butoxy)silanol and water as the precursor couple. By adjusting the number of deposition cycles, the thickness of the conformal silica coating was controlled, reducing the effective pore diameter, and subsequently changing the transport properties of the PA membrane. Silica coated PA membranes with desired pore diameters from <5 nm to 100 nm were fabricated. In addition to the pore size, the transport properties and selectivity of fabricated silica coated PA membranes were controlled by chemical functionalisation using a silane with hydrophobic properties. Structural and chemical properties of modified membranes were studied by dynamic secondary ion mass spectrometry (DSIMS) and scanning electron microscopy (SEM). Spectrophotometric methods were used to evaluate the transport properties and selectivity of silica coated membranes by permeation studies of hydrophobic and hydrophilic organic molecules. The resultant silica/PA membranes with specific surface chemistry and controlled pore size are applicable for molecular separation, cell culture, bioreactors, biosensing and drug delivery.

Original languageEnglish
Article number72670S
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume7267
DOIs
Publication statusPublished - 30 Dec 2008
EventSmart Materials V - Melbourne, VIC, Australia
Duration: 10 Dec 200812 Dec 2008

Keywords

  • Atomic layer deposition
  • Molecular separation
  • Porous alumina membrane composite membranes

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