Calibration of AFM cantilever spring constants

Christopher T. Gibson; Brandon L. Weeks; Chris Abell; Trevor Rayment; Sverre Myhra

doi:10.1016/S0304-3991(03)00035-4

Calibration of AFM cantilever spring constants

Christopher T. Gibson, Brandon L. Weeks, Chris Abell, Trevor Rayment, Sverre Myhra

Research output: Contribution to journal › Article › peer-review

44 Citations (Scopus)

Abstract

In this paper we present two simple, reliable and readily applicable methods for calibrating cantilevers and measuring the thickness of thin gold films. The spring constant calibration requires knowledge of the Young's modulus, density of the cantilever and resonant frequency. The thickness of thin gold layers was determined by measuring changes in the resonant frequency and Q-factor of beam shaped AFM cantilevers before and after coating. The techniques for measuring the spring constant and thin film thickness provide accuracy on the order of 10-15%.

Original language	English
Pages (from-to)	113-118
Number of pages	6
Journal	Ultramicroscopy
Volume	97
Issue number	1-4
DOIs	https://doi.org/10.1016/S0304-3991(03)00035-4
Publication status	Published - Oct 2003
Externally published	Yes

Keywords

Cantilever
Q-factor
Resonant frequency and spring constant

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abstract = "In this paper we present two simple, reliable and readily applicable methods for calibrating cantilevers and measuring the thickness of thin gold films. The spring constant calibration requires knowledge of the Young's modulus, density of the cantilever and resonant frequency. The thickness of thin gold layers was determined by measuring changes in the resonant frequency and Q-factor of beam shaped AFM cantilevers before and after coating. The techniques for measuring the spring constant and thin film thickness provide accuracy on the order of 10-15%.",

keywords = "Cantilever, Q-factor, Resonant frequency and spring constant",

author = "Gibson, {Christopher T.} and Weeks, {Brandon L.} and Chris Abell and Trevor Rayment and Sverre Myhra",

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AU - Gibson, Christopher T.

AU - Weeks, Brandon L.

AU - Abell, Chris

AU - Rayment, Trevor

AU - Myhra, Sverre

PY - 2003/10

Y1 - 2003/10

N2 - In this paper we present two simple, reliable and readily applicable methods for calibrating cantilevers and measuring the thickness of thin gold films. The spring constant calibration requires knowledge of the Young's modulus, density of the cantilever and resonant frequency. The thickness of thin gold layers was determined by measuring changes in the resonant frequency and Q-factor of beam shaped AFM cantilevers before and after coating. The techniques for measuring the spring constant and thin film thickness provide accuracy on the order of 10-15%.

AB - In this paper we present two simple, reliable and readily applicable methods for calibrating cantilevers and measuring the thickness of thin gold films. The spring constant calibration requires knowledge of the Young's modulus, density of the cantilever and resonant frequency. The thickness of thin gold layers was determined by measuring changes in the resonant frequency and Q-factor of beam shaped AFM cantilevers before and after coating. The techniques for measuring the spring constant and thin film thickness provide accuracy on the order of 10-15%.

KW - Cantilever

KW - Q-factor

KW - Resonant frequency and spring constant

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JO - Ultramicroscopy

JF - Ultramicroscopy

IS - 1-4

ER -

Calibration of AFM cantilever spring constants

Abstract

Keywords

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