Carbon bonding states and mechanical properties of hydrogenated DLC films deposited in electrostatic and electromagnetic RF plasma modes

Z Sun, S Xu, Kontyantyn Ostrikov, E Tsakadze, Z Tsakadze

    Research output: Contribution to journalArticle

    1 Citation (Scopus)
    Original languageEnglish
    Pages (from-to)836-840
    Number of pages5
    JournalInternational Journal of Modern Physics B
    Volume16
    Issue number6&7
    Publication statusPublished - 2002

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