Carbon bonding states and mechanical properties of hydrogenated DLC films deposited in electrostatic and electromagnetic RF plasma modes

Z Sun, S Xu, Kontyantyn Ostrikov, E Tsakadze, Z Tsakadze

Research output: Contribution to journal › Article

1 Citation (Scopus)

Original language	English
Pages (from-to)	836-840
Number of pages	5
Journal	International Journal of Modern Physics B
Volume	16
Issue number	6&7
Publication status	Published - 2002

Cite this

@article{53de53a2dd8545979cce13672872b761,

title = "Carbon bonding states and mechanical properties of hydrogenated DLC films deposited in electrostatic and electromagnetic RF plasma modes",

author = "Z Sun and S Xu and Kontyantyn Ostrikov and E Tsakadze and Z Tsakadze",

year = "2002",

language = "English",

volume = "16",

pages = "836--840",

journal = "International Journal of Modern Physics B",

issn = "0217-9792",

publisher = "WORLD SCIENTIFIC PUBLISHING",

number = "6&7",

}

TY - JOUR

T1 - Carbon bonding states and mechanical properties of hydrogenated DLC films deposited in electrostatic and electromagnetic RF plasma modes

AU - Sun, Z

AU - Xu, S

AU - Ostrikov, Kontyantyn

AU - Tsakadze, E

AU - Tsakadze, Z

PY - 2002

Y1 - 2002

M3 - Article

VL - 16

SP - 836

EP - 840

JO - International Journal of Modern Physics B

JF - International Journal of Modern Physics B

SN - 0217-9792

IS - 6&7

ER -