Carbon nanotubes and polymer based pressure micro-sensor for manometric catheters

M. F. Teng, A. Hariz, H. Y. Hsu, T. Omari

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Citation (Scopus)


In this paper we investigate the fabrication process of a novel polymer based pressure micro-sensor for use in manometric measurements in medical diagnostics. Review and analysis of polymer materials properties and polymer based sensors has been carried out and has been reported by us elsewhere [1]. The interest in developing a novel polymer based flexible pressure micro-sensor was motivated by the numerous problems inherent in the currently available manometric catheters used in the hospitals. The most critical issue regarding existing catheters was the running and maintenance costs [2]. Thus expensive operation costs lead to reuse of the catheters, which increase the risk for disease transmission. The novel flexible polymer based pressure micro-sensor was build using SU-8, which is a special kind of negative photoresist. Single-walled carbon nanotubes (SWCNTs) and aluminum are used as the sensing material and contacting electrodes respectively. The pressure sensor diaphragm was first patterned on top of an oxidized silicon wafer using SU-8, followed by aluminum deposition to define the electrodes. The carbon nanotube is then deposited using dielectrophoresis (DEP) process. Once the carbon nanotubes are aligned in between these electrodes, the remaining of the sensor structure is formed using SU-8. Patterning of SU-8 and release from the substrate make the device ready for further testing of sensing ability. This research not only investigates the use of polymeric materials to build pressure sensors, but also explores the feasibility of full utilization of polymeric materials to replace conventional silicon materials in micro-sensors fabrication for use in medical environments. The completed sensor is expected to form an integral part of a large versatile sensing system. For example, the biocompatible artificial skin, is predicted to be capable of sensing force, pressure, temperature, and humidity, and may be used in such applications as medical and robotic system.

Original languageEnglish
Title of host publicationProc. SPIE, Micro- and Nanotechnology
Subtitle of host publicationMaterials, Processes, Packaging, and Systems IV
Publication statusPublished - 30 Dec 2008
Externally publishedYes
EventSPIE Smart Material, Nano- and Micro-Smart Systems - Melbourne, Australia
Duration: 10 Dec 200812 Dec 2008

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
ISSN (Print)0277-786X


ConferenceSPIE Smart Material, Nano- and Micro-Smart Systems


  • Carbon nanotube
  • MEMS
  • Micromachining
  • Polymers
  • Pressure sensor
  • SU-8


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