Charging and Trapping of Macroparticles in Near-Electrode Regions of Fluorocarbon Plasmas with Negative Ions

Kontyantyn Ostrikov, Sunil Kumar, H Sugai

    Research output: Contribution to journalArticle

    76 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)3490-3497
    Number of pages8
    JournalPhysics of Plasmas
    Volume8
    Issue number7
    Publication statusPublished - 2001

    Cite this