Charging and Trapping of Macroparticles in Near-Electrode Regions of Fluorocarbon Plasmas with Negative Ions

Kontyantyn Ostrikov, Sunil Kumar, H Sugai

Research output: Contribution to journal › Article › peer-review

83 Citations (Scopus)

Cite this

@article{effb88cc1f674546ac6cf95366d8a28d,

title = "Charging and Trapping of Macroparticles in Near-Electrode Regions of Fluorocarbon Plasmas with Negative Ions",

author = "Kontyantyn Ostrikov and Sunil Kumar and H Sugai",

year = "2001",

language = "English",

volume = "8",

pages = "3490--3497",

journal = "Physics of Plasmas",

issn = "1070-664X",

publisher = "American Institute of Physics",

number = "7",

}