Composition and properties of RF-sputter deposited titanium dioxide thin films

Jesse Daughtry, Abdulrahman S. Alotabi, Liam Howard-Fabretto, Gunther G. Andersson

Research output: Contribution to journalArticlepeer-review

14 Citations (Scopus)
17 Downloads (Pure)


The photocatalytic properties of titania (TiO2) have prompted research utilising its useful ability to convert solar energy into electron-hole pairs to drive novel chemistry. The aim of the present work is to examine the properties required for a synthetic method capable of producing thin TiO2films, with well defined, easily modifiable characteristics. Presented here is a method of synthesis of TiO2nanoparticulate thin films generated using RF plasma capable of homogenous depositions with known elemental composition and modifiable properties at a far lower cost than single-crystal TiO2. Multiple depositions regimes were examined for their effect on overall chemical composition and to minimise the unwanted contaminant, carbon, from the final film. The resulting TiO2films can be easily modified through heating to further induce defects and change the electronic structure, crystallinity, surface morphology and roughness of the deposited thin film.

Original languageEnglish
Pages (from-to)1077-1086
Number of pages10
JournalNanoscale Advances
Issue number4
Publication statusPublished - 21 Feb 2021


  • soft X-ray spectroscopy beamline
  • Australian Synchrotron
  • Microscopy Australia
  • Australian National Fabrication Facility
  • Flinders Microscopy and Microanalysis
  • Dr Cameron Shearer
  • University of Adelaide
  • Titania
  • TiO2


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