Control and diagnostics of inductively coupled plasmas for chemical vapour deposition of nanocomposite carbon nitride-based films

E Tsakadze, Kontyantyn Ostrikov, Z Tsakadze, Nan Jiang, R Ahmad, S Xu

    Research output: Contribution to journalArticle

    5 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)1143-1147
    Number of pages5
    JournalInternational Journal of Modern Physics B
    Volume16
    Issue number6&7
    Publication statusPublished - 2002

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