Control and diagnostics of inductively coupled plasmas for chemical vapour deposition of nanocomposite carbon nitride-based films

E Tsakadze, Kontyantyn Ostrikov, Z Tsakadze, Nan Jiang, R Ahmad, S Xu

Research output: Contribution to journal › Article › peer-review

5 Citations (Scopus)

Original language	English
Pages (from-to)	1143-1147
Number of pages	5
Journal	International Journal of Modern Physics B
Volume	16
Issue number	6&7
Publication status	Published - 2002

Cite this

@article{1d9476a2c9ac4243ade415d99421e80b,

title = "Control and diagnostics of inductively coupled plasmas for chemical vapour deposition of nanocomposite carbon nitride-based films",

author = "E Tsakadze and Kontyantyn Ostrikov and Z Tsakadze and Nan Jiang and R Ahmad and S Xu",

year = "2002",

language = "English",

volume = "16",

pages = "1143--1147",

journal = "International Journal of Modern Physics B",

issn = "0217-9792",

publisher = "World Scientific Publishing",

number = "6&7",

}

TY - JOUR

T1 - Control and diagnostics of inductively coupled plasmas for chemical vapour deposition of nanocomposite carbon nitride-based films

AU - Tsakadze, E

AU - Ostrikov, Kontyantyn

AU - Tsakadze, Z

AU - Jiang, Nan

AU - Ahmad, R

AU - Xu, S

PY - 2002

Y1 - 2002

M3 - Article

SN - 0217-9792

VL - 16

SP - 1143

EP - 1147

JO - International Journal of Modern Physics B

JF - International Journal of Modern Physics B

IS - 6&7

ER -