Density functional theory based evaluations of the reactive ion etchin: Process model for TiO2 (anatase) thin film
- Hirofumi Kishi
- , Nobuki Ozawa
- , Melanie Y. David
- , Tanglaw A. Roman
- , Nelson B. Arboleda
- , Wilson A.T. Diño
- , Hiroshi Nakanishi
- , Hideaki Kasai
- , Fumiyoshi Takano
- , Hisashi Shima
- , Hiro Akinaga
Research output: Contribution to journal › Article › peer-review
2
Citations
(Scopus)