Diagnostics and two-dimensional simulation of low-frequency inductively coupled plasmas with neutral gas heating and electron heat fluxes

K Ostrikov, I Denysenko, E Tsakadze, S Xu, Robin Storer

    Research output: Contribution to journalArticlepeer-review

    34 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)4935-4946
    Number of pages12
    JournalJournal of Applied Physics
    Issue number9
    Publication statusPublished - 2002

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