Diagnostics and two-dimensional simulation of low-frequency inductively coupled plasmas with neutral gas heating and electron heat fluxes

K Ostrikov, I Denysenko, E Tsakadze, S Xu, Robin Storer

Research output: Contribution to journal › Article › peer-review

34 Citations (Scopus)

Cite this

@article{bb57b953973343a1b735eee18c358850,

title = "Diagnostics and two-dimensional simulation of low-frequency inductively coupled plasmas with neutral gas heating and electron heat fluxes",

author = "K Ostrikov and I Denysenko and E Tsakadze and S Xu and Robin Storer",

year = "2002",

language = "English",

volume = "92",

pages = "4935--4946",

journal = "Journal of Applied Physics",

issn = "0021-8979",

publisher = "American Institute of Physics",

number = "9",

}

TY - JOUR

T1 - Diagnostics and two-dimensional simulation of low-frequency inductively coupled plasmas with neutral gas heating and electron heat fluxes

AU - Ostrikov, K

AU - Denysenko, I

AU - Tsakadze, E

AU - Xu, S

AU - Storer, Robin

PY - 2002

Y1 - 2002

M3 - Article

SN - 0021-8979

VL - 92

SP - 4935

EP - 4946

JO - Journal of Applied Physics

JF - Journal of Applied Physics

IS - 9

ER -