Dynamics of mode transitions in inductively-coupled plasmas

K Ostrikov, E Tsakadze, Z Tsakadze, J Ning, J Long, Robin Storer, S Xu

    Research output: Contribution to journalArticle

    11 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)128-129
    Number of pages2
    JournalIEEE Transactions on Plasma Science
    Volume30
    Issue number1
    Publication statusPublished - 2002

    Cite this

    Ostrikov, K., Tsakadze, E., Tsakadze, Z., Ning, J., Long, J., Storer, R., & Xu, S. (2002). Dynamics of mode transitions in inductively-coupled plasmas. IEEE Transactions on Plasma Science, 30(1), 128-129.