Dynamics of mode transitions in inductively-coupled plasmas

K Ostrikov, E Tsakadze, Z Tsakadze, J Ning, J Long, Robin Storer, S Xu

    Research output: Contribution to journalArticlepeer-review

    11 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)128-129
    Number of pages2
    JournalIEEE Transactions on Plasma Science
    Volume30
    Issue number1
    Publication statusPublished - 2002

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