Efficient Passivation and Low Resistivity for p+-Si/TiO2Contact by Atomic Layer Deposition

Naeimeh Mozaffari, Heping Shen, Yanting Yin, Yueliang Li, Daniel Hiller, Daniel A. Jacobs, Hieu T. Nguyen, Pheng Phang, Gunther G. Andersson, Ute Kaiser, Thomas P. White, Klaus Weber, Kylie R. Catchpole

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