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Efficient Passivation and Low Resistivity for p+-Si/TiO2Contact by Atomic Layer Deposition
Naeimeh Mozaffari, Heping Shen, Yanting Yin, Yueliang Li, Daniel Hiller, Daniel A. Jacobs, Hieu T. Nguyen, Pheng Phang, Gunther G. Andersson, Ute Kaiser, Thomas P. White, Klaus Weber, Kylie R. Catchpole
Research output: Contribution to journal › Article › peer-review
6
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(Scopus)