Elastic Cross Sections for Electron Collisions with Molecules Relevant to Plasma Processing

J.-S. Yoon, M.-Y. Song, H Kato, M Hoshino, H Tanaka, Michael Brunger, S Buckman, Hyuck Cho

    Research output: Contribution to journalArticlepeer-review

    36 Citations (Scopus)

    Fingerprint

    Dive into the research topics of 'Elastic Cross Sections for Electron Collisions with Molecules Relevant to Plasma Processing'. Together they form a unique fingerprint.

    Physics

    Engineering