Elastic Cross Sections for Electron Collisions with Molecules Relevant to Plasma Processing
- J.-S. Yoon
- , M.-Y. Song
- , H Kato
- , M Hoshino
- , H Tanaka
- , Michael Brunger
- , S Buckman
- , Hyuck Cho
Research output: Contribution to journal › Article › peer-review
37
Citations
(Scopus)