Electron interaction cross sections for a low-temperature 'plasma-like' gas mixture

Leigh Hargreaves, Jessica Brunton, Michael Brunger, S Buckman

    Research output: Contribution to journalArticle

    6 Citations (Scopus)

    Abstract

    Electron interaction cross sections for species found in low-temperature industrial plasma environments are a crucial component to allow for accurate modeling of those plasmas. However, such data are still rarely reported in the literature, due to the complexities of working with such highly reactive species in a laboratory. Here, absolute differential cross section measurements for a 'plasma-like' gas mixture, containing CF3I, CF3, I 2, I and C2F6, are reported.

    Original languageEnglish
    Article number065021
    Pages (from-to)065021-1-065021-7
    Number of pages7
    JournalPlasma Sources Science and Technology
    Volume19
    Issue number6
    DOIs
    Publication statusPublished - Dec 2010

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