Equilibrium and Relaxation of Particle Charge in Flurorocarbon Plasmas

Kontyantyn Ostrikov, Sunil Kumar, H Sugai

    Research output: Contribution to journalArticlepeer-review

    12 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)5919-5926
    Number of pages8
    JournalJournal of Applied Physics
    Volume89
    Issue number11
    Publication statusPublished - 2001

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