Equilibrium and Relaxation of Particle Charge in Flurorocarbon Plasmas

Kontyantyn Ostrikov, Sunil Kumar, H Sugai

Research output: Contribution to journal › Article › peer-review

13 Citations (Scopus)

Cite this

@article{e5108afcd0bc4d5eafbd30876999f631,

title = "Equilibrium and Relaxation of Particle Charge in Flurorocarbon Plasmas",

author = "Kontyantyn Ostrikov and Sunil Kumar and H Sugai",

year = "2001",

language = "English",

volume = "89",

pages = "5919--5926",

journal = "Journal of Applied Physics",

issn = "0021-8979",

publisher = "American Institute of Physics",

number = "11",

}