Inductively coupled plasmas sustained by an internal oscillating current

E Tsakadze, K Ostrikov, S Xu, Robin Storer, H Sugai

Research output: Contribution to journal › Article › peer-review

9 Citations (Scopus)

Cite this

@article{12d2a76944194c1aac13afbf4e397e78,

title = "Inductively coupled plasmas sustained by an internal oscillating current",

author = "E Tsakadze and K Ostrikov and S Xu and Robin Storer and H Sugai",

year = "2002",

language = "English",

volume = "91",

pages = "1804--1813",

journal = "Journal of Applied Physics",

issn = "0021-8979",

publisher = "American Institute of Physics",

number = "4",

}