Inductively coupled plasmas sustained by an internal oscillating current

E Tsakadze, K Ostrikov, S Xu, Robin Storer, H Sugai

    Research output: Contribution to journalArticle

    9 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)1804-1813
    Number of pages10
    JournalJournal of Applied Physics
    Volume91
    Issue number4
    Publication statusPublished - 2002

    Cite this

    Tsakadze, E., Ostrikov, K., Xu, S., Storer, R., & Sugai, H. (2002). Inductively coupled plasmas sustained by an internal oscillating current. Journal of Applied Physics, 91(4), 1804-1813.