Low-Frequency, High-Density, Inductively Coupled Plasma Sources: Operation and Applications

S Xu, Kontyantyn Ostrikov, Y Li, T Tsakadze, Ieuan Jones

Research output: Contribution to journal › Article › peer-review

180 Citations (Scopus)

Cite this

@article{315fb7e09d94469cb2f24a732938935e,

title = "Low-Frequency, High-Density, Inductively Coupled Plasma Sources: Operation and Applications",

author = "S Xu and Kontyantyn Ostrikov and Y Li and T Tsakadze and Ieuan Jones",

year = "2001",

language = "English",

volume = "8",

pages = "2549--2557",

journal = "Physics of Plasmas",

issn = "1070-664X",

publisher = "American Institute of Physics",

number = "5",

}