Low-Frequency, High-Density, Inductively Coupled Plasma Sources: Operation and Applications

S Xu, Kontyantyn Ostrikov, Y Li, T Tsakadze, Ieuan Jones

    Research output: Contribution to journalArticlepeer-review

    167 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)2549-2557
    Number of pages9
    JournalPhysics of Plasmas
    Volume8
    Issue number5
    Publication statusPublished - 2001

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