Low Temperature Atomic Layer Deposition of Titania Thin Films

Gerry Triani; Jonathan Campbell; Peter Evans; J Davis; B Latella; Robert Burford

doi:10.1016/j.tsf.2009.09.010

Low Temperature Atomic Layer Deposition of Titania Thin Films

Gerry Triani, Jonathan Campbell, Peter Evans, J Davis, B Latella, Robert Burford

Research output: Contribution to journal › Article

46 Citations (Scopus)

Abstract

This paper presents a comprehensive study of atomic layer deposition of TiO₂ films on silicon and polycarbonate substrates using TiCl₄ and H₂O as precursors at temperatures in the range 80-120 °C. An in-situ quartz crystal microbalance was used to monitor different processing conditions and the resultant films were characterised ex-situ using a suite of surface analytical tools. In addition, the contact angle and wettability of as-deposited and UV irradiated films were assessed. The latter was found to reduce the contact angle from ≥ 80° to < 10°. Finally, the effect of surface pre-treatment on film toughness and adhesion was investigated and the results show a significant improvement for the pre-treated films.

Original language	English
Pages (from-to)	3182-3189
Number of pages	8
Journal	Thin Solid Films
Volume	518
Issue number	12
DOIs	https://doi.org/10.1016/j.tsf.2009.09.010
Publication status	Published - 2 Apr 2010

Keywords

Adhesion and tensile properties
Atomic layer deposition
Contact angle
Photoactivity
Polymer substrates
Titanium dioxide

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10.1016/j.tsf.2009.09.010

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Triani, G., Campbell, J., Evans, P., Davis, J., Latella, B., & Burford, R. (2010). Low Temperature Atomic Layer Deposition of Titania Thin Films. Thin Solid Films, 518(12), 3182-3189. https://doi.org/10.1016/j.tsf.2009.09.010

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abstract = "This paper presents a comprehensive study of atomic layer deposition of TiO2 films on silicon and polycarbonate substrates using TiCl4 and H2O as precursors at temperatures in the range 80-120 °C. An in-situ quartz crystal microbalance was used to monitor different processing conditions and the resultant films were characterised ex-situ using a suite of surface analytical tools. In addition, the contact angle and wettability of as-deposited and UV irradiated films were assessed. The latter was found to reduce the contact angle from ≥ 80° to < 10°. Finally, the effect of surface pre-treatment on film toughness and adhesion was investigated and the results show a significant improvement for the pre-treated films.",

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