Measuring the thickness profiles of wafers to subnanometer resolution using Fabry-Perot interferometry

D Farrant, John Arkwright, Philip Fairman, R Netterfield

    Research output: Contribution to journalArticlepeer-review

    4 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)2863-2869
    Number of pages7
    JournalApplied Optics
    Volume46
    Issue number15
    Publication statusPublished - 2007

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