Measuring the thickness profiles of wafers to subnanometer resolution using Fabry-Perot interferometry

D Farrant, John Arkwright, Philip Fairman, R Netterfield

Research output: Contribution to journal › Article › peer-review

6 Citations (Scopus)

Cite this

@article{63b98360b97b44948166db3a4b8cf070,

title = "Measuring the thickness profiles of wafers to subnanometer resolution using Fabry-Perot interferometry",

author = "D Farrant and John Arkwright and Philip Fairman and R Netterfield",

year = "2007",

language = "English",

volume = "46",

pages = "2863--2869",

journal = "Applied Optics",

issn = "1559-128X",

publisher = "Optica Publishing Group",

number = "15",

}