Nanopowder management and control of plasma parameters in electronegative SiH4 plasmas

I Denysenko, K Ostrikov, S Xu, M Yu, C Diong

    Research output: Contribution to journalArticle

    68 Citations (Scopus)
    Original languageEnglish
    Article numberCC
    Pages (from-to)6097-6107
    Number of pages11
    JournalJournal of Applied Physics
    Volume94
    Issue number9
    Publication statusPublished - 2003

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