Nanopowder management and control of plasma parameters in electronegative SiH4 plasmas

I Denysenko, K Ostrikov, S Xu, M Yu, C Diong

Research output: Contribution to journal › Article › peer-review

69 Citations (Scopus)

Cite this

@article{32965c47b062496698dca443dc2562e1,

title = "Nanopowder management and control of plasma parameters in electronegative SiH4 plasmas",

author = "I Denysenko and K Ostrikov and S Xu and M Yu and C Diong",

year = "2003",

language = "English",

volume = "94",

pages = "6097--6107",

journal = "Journal of Applied Physics",

issn = "0021-8979",

publisher = "American Institute of Physics",

number = "9",

}