Nanosphere lithography using thermal evaporation of gold

BS Flavel; JG Shapter; JS Quinton

doi:10.1117/12.695409

Nanosphere lithography using thermal evaporation of gold

BS Flavel, JG Shapter, JS Quinton

College of Science and Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

7 Citations (Scopus)

22 Downloads (Pure)

Abstract

Nanosphere lithography, which allows for the fabrication of patterned metal surfaces, is a simple, effective and unconventional technique that exploits a self-assembly process. Using this technique, polystyrene nanospheres with diameters of 500nm, and 100nm were assembled onto a 'muscovite' mica substrate in a hexagonally close packed monolayer array, to provide a physical mask for material deposition. Thermal evaporation was subsequently used to deposit gold through the nanosphere mask layer, to generate a periodic array of gold nanostructures. Upon changing the mask to a multi-layered array of nanospheres, slightly more complex nanostructures were achieved. However due to thermal evaporation being a high temperature process the nanostructures obtained deviated from their predicted quasi triangular shape due to a slight annealing of the polystyrene mask.

Original language	English
Title of host publication	Micro- and Nanotechnology
Subtitle of host publication	Materials, Processes, Packaging, and Systems III
Editors	Jung-Chih Chiao, Andrew S. Dzurak, Chennupati Jagadish, David Victor Thiel
Publisher	SPIE
Chapter	64151J
ISBN (Print)	9780819465238
DOIs	https://doi.org/10.1117/12.695409
Publication status	Published - 2007
Event	SPIE International Symposium on Smart Materials, Nano- and Micro-Smart Systems - Adelaide, Australia Duration: 10 Dec 2006 → 13 Dec 2006 https://www.spiedigitallibrary.org/conference-proceedings-of-SPIE/6415.toc (Book of proceedings)

Publication series

Name	Proceedings of SPIE
Volume	6415
ISSN (Print)	0277-786X

Conference

Conference	SPIE International Symposium on Smart Materials, Nano- and Micro-Smart Systems
Country/Territory	Australia
City	Adelaide
Period	10/12/06 → 13/12/06
Internet address	https://www.spiedigitallibrary.org/conference-proceedings-of-SPIE/6415.toc (Book of proceedings)

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10.1117/12.695409Licence: In Copyright

641501Final published version, 522 KBLicence: In Copyright

Cite this

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title = "Nanosphere lithography using thermal evaporation of gold",

abstract = "Nanosphere lithography, which allows for the fabrication of patterned metal surfaces, is a simple, effective and unconventional technique that exploits a self-assembly process. Using this technique, polystyrene nanospheres with diameters of 500nm, and 100nm were assembled onto a 'muscovite' mica substrate in a hexagonally close packed monolayer array, to provide a physical mask for material deposition. Thermal evaporation was subsequently used to deposit gold through the nanosphere mask layer, to generate a periodic array of gold nanostructures. Upon changing the mask to a multi-layered array of nanospheres, slightly more complex nanostructures were achieved. However due to thermal evaporation being a high temperature process the nanostructures obtained deviated from their predicted quasi triangular shape due to a slight annealing of the polystyrene mask.",

author = "BS Flavel and JG Shapter and JS Quinton",

year = "2007",

doi = "10.1117/12.695409",

language = "English",

isbn = "9780819465238",

series = "Proceedings of SPIE",

publisher = "SPIE",

editor = "Jung-Chih Chiao and Dzurak, {Andrew S.} and Chennupati Jagadish and Thiel, {David Victor}",

booktitle = "Micro- and Nanotechnology",

note = "SPIE International Symposium on Smart Materials, Nano- and Micro-Smart Systems ; Conference date: 10-12-2006 Through 13-12-2006",

url = "https://www.spiedigitallibrary.org/conference-proceedings-of-SPIE/6415.toc",

}

Flavel, BS, Shapter, JG & Quinton, JS 2007, Nanosphere lithography using thermal evaporation of gold. in J-C Chiao, AS Dzurak, C Jagadish & DV Thiel (eds), Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems III ., 6415-61, Proceedings of SPIE, vol. 6415, SPIE, SPIE International Symposium on Smart Materials, Nano- and Micro-Smart Systems, Adelaide, South Australia, Australia, 10/12/06. https://doi.org/10.1117/12.695409

Nanosphere lithography using thermal evaporation of gold. / Flavel, BS; Shapter, JG ; Quinton, JS.
Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems III . ed. / Jung-Chih Chiao; Andrew S. Dzurak; Chennupati Jagadish; David Victor Thiel. SPIE, 2007. 6415-61 (Proceedings of SPIE; Vol. 6415).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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T1 - Nanosphere lithography using thermal evaporation of gold

AU - Flavel, BS

AU - Shapter, JG

AU - Quinton, JS

PY - 2007

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N2 - Nanosphere lithography, which allows for the fabrication of patterned metal surfaces, is a simple, effective and unconventional technique that exploits a self-assembly process. Using this technique, polystyrene nanospheres with diameters of 500nm, and 100nm were assembled onto a 'muscovite' mica substrate in a hexagonally close packed monolayer array, to provide a physical mask for material deposition. Thermal evaporation was subsequently used to deposit gold through the nanosphere mask layer, to generate a periodic array of gold nanostructures. Upon changing the mask to a multi-layered array of nanospheres, slightly more complex nanostructures were achieved. However due to thermal evaporation being a high temperature process the nanostructures obtained deviated from their predicted quasi triangular shape due to a slight annealing of the polystyrene mask.

AB - Nanosphere lithography, which allows for the fabrication of patterned metal surfaces, is a simple, effective and unconventional technique that exploits a self-assembly process. Using this technique, polystyrene nanospheres with diameters of 500nm, and 100nm were assembled onto a 'muscovite' mica substrate in a hexagonally close packed monolayer array, to provide a physical mask for material deposition. Thermal evaporation was subsequently used to deposit gold through the nanosphere mask layer, to generate a periodic array of gold nanostructures. Upon changing the mask to a multi-layered array of nanospheres, slightly more complex nanostructures were achieved. However due to thermal evaporation being a high temperature process the nanostructures obtained deviated from their predicted quasi triangular shape due to a slight annealing of the polystyrene mask.

U2 - 10.1117/12.695409

DO - 10.1117/12.695409

M3 - Conference contribution

SN - 9780819465238

T3 - Proceedings of SPIE

BT - Micro- and Nanotechnology

A2 - Chiao, Jung-Chih

A2 - Dzurak, Andrew S.

A2 - Jagadish, Chennupati

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PB - SPIE

T2 - SPIE International Symposium on Smart Materials, Nano- and Micro-Smart Systems

Y2 - 10 December 2006 through 13 December 2006

ER -

Nanosphere lithography using thermal evaporation of gold

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