Nonlinear electromagnetic fields in 0.5 MHz inductively coupled plasmas

K Ostrikov, E Tsakadze, S Xu, S Vladimirov, Robin Storer

    Research output: Contribution to journalArticle

    9 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)1146-1151
    Number of pages6
    JournalPhysics of Plasmas
    Volume10
    Issue number4
    Publication statusPublished - 2003

    Cite this

    Ostrikov, K., Tsakadze, E., Xu, S., Vladimirov, S., & Storer, R. (2003). Nonlinear electromagnetic fields in 0.5 MHz inductively coupled plasmas. Physics of Plasmas, 10(4), 1146-1151.