Nonlinear electromagnetic fields in 0.5 MHz inductively coupled plasmas

K Ostrikov, E Tsakadze, S Xu, S Vladimirov, Robin Storer

    Research output: Contribution to journalArticlepeer-review

    9 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)1146-1151
    Number of pages6
    JournalPhysics of Plasmas
    Volume10
    Issue number4
    Publication statusPublished - 2003

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