Nonlinear electromagnetic fields in 0.5 MHz inductively coupled plasmas

K Ostrikov, E Tsakadze, S Xu, S Vladimirov, Robin Storer

Research output: Contribution to journal › Article › peer-review

12 Citations (Scopus)

Cite this

@article{44f66aca969f43f5ae4502db4967c808,

title = "Nonlinear electromagnetic fields in 0.5 MHz inductively coupled plasmas",

author = "K Ostrikov and E Tsakadze and S Xu and S Vladimirov and Robin Storer",

year = "2003",

language = "English",

volume = "10",

pages = "1146--1151",

journal = "Physics of Plasmas",

issn = "1070-664X",

publisher = "American Institute of Physics",

number = "4",

}