Optical emission characteristics and mode transitions in low-frequency inductively coupled plasmas

Konstyantyn Ostrikov, S Xu, A Azam

    Research output: Contribution to journalArticlepeer-review

    62 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)251-264
    Number of pages14
    JournalJournal of Vacuum Science and Technology A
    Volume20
    Issue number1
    Publication statusPublished - 2002

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