Optical emission characteristics and mode transitions in low-frequency inductively coupled plasmas

Konstyantyn Ostrikov, S Xu, A Azam

Research output: Contribution to journal › Article › peer-review

65 Citations (Scopus)

Original language	English
Pages (from-to)	251-264
Number of pages	14
Journal	Journal of Vacuum Science and Technology A
Volume	20
Issue number	1
Publication status	Published - 2002

Cite this

@article{180317d116244a61bcebce08ab8a5094,

title = "Optical emission characteristics and mode transitions in low-frequency inductively coupled plasmas",

author = "Konstyantyn Ostrikov and S Xu and A Azam",

year = "2002",

language = "English",

volume = "20",

pages = "251--264",

journal = "Journal of Vacuum Science and Technology A",

issn = "0734-2101",

publisher = "American Institute of Physics",

number = "1",

}