| Original language | English |
|---|---|
| Publication status | Published - 2007 |
| Event | Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems III - Duration: 10 Dec 2006 → … |
Conference
| Conference | Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems III |
|---|---|
| Period | 10/12/06 → … |
Cite this
- APA
- Author
- BIBTEX
- Harvard
- Standard
- RIS
- Vancouver