TY - GEN
T1 - Optoelectronic Enhancement for Piezoresistive Pressure Sensor
AU - Nguyen, Thanh
AU - Dinh, Toan
AU - Phan, Hoang-Phuong
AU - Nguyen, Tuan-Khoa
AU - Foisal, Abu Riduan Md
AU - Nguyen, Nam-Trung
AU - Dao, Dzung Viet
PY - 2020/1
Y1 - 2020/1
N2 - Pressure sensing is a critical task of microelectromechanical systems with a wide range of applications. Enhancing the performance such as sensitivity, durability, reliability, linearity and response time of pressure sensors has always been a top priority for researchers and technology developers. This paper demonstrates a new method for enhancing the performance of a piezoresistive pressure sensor. By using light illumination combined with controlling supply current, the performance of a 3C-SiC/Si heterojunction piezoresistive pressure sensor is significantly improved. The sensitivity of the pressure sensor is enhanced a few hundred thousand times under bright condition in comparison with that under dark condition. This enhancement is unprecedented for a micromachined pressure sensor. In addition, the durability, signal to noise ratio and measurement range are substantially improved.
AB - Pressure sensing is a critical task of microelectromechanical systems with a wide range of applications. Enhancing the performance such as sensitivity, durability, reliability, linearity and response time of pressure sensors has always been a top priority for researchers and technology developers. This paper demonstrates a new method for enhancing the performance of a piezoresistive pressure sensor. By using light illumination combined with controlling supply current, the performance of a 3C-SiC/Si heterojunction piezoresistive pressure sensor is significantly improved. The sensitivity of the pressure sensor is enhanced a few hundred thousand times under bright condition in comparison with that under dark condition. This enhancement is unprecedented for a micromachined pressure sensor. In addition, the durability, signal to noise ratio and measurement range are substantially improved.
KW - optoelectronic coupling
KW - piezoresistive pressure sensor
KW - Ultrasensitive pressure sensor
UR - https://www.scopus.com/pages/publications/85083281840
UR - http://purl.org/au-research/grants/ARC/LP150100153
UR - http://purl.org/au-research/grants/ARC/LP160101553
U2 - 10.1109/MEMS46641.2020.9056281
DO - 10.1109/MEMS46641.2020.9056281
M3 - Conference contribution
AN - SCOPUS:85083281840
T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
SP - 681
EP - 684
BT - 33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020
PB - Institute of Electrical and Electronics Engineers
T2 - 33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020
Y2 - 18 January 2020 through 22 January 2020
ER -