Abstract
Copolyamic acid is obtained from tetracarboxylic acid dianhydride, diamine and a fluorinated diamine and/or fluorinated tetracarboxylic acid dianhydride; and optionally ester or amine salt derivative thereof to obtain radiation sensitive polymer; and low optical high thermally stable polyimide from curing the above polyamic acid and/or derivative thereof.
| Original language | English |
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| Patent number | US5464927A |
| Priority date | 10/05/93 |
| Filing date | 10/05/93 |
| Publication status | Published - 1995 |