Original language | English |
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Pages (from-to) | 3302-3305 |
Number of pages | 4 |
Journal | Applied Physics Letters |
Volume | 83 |
Issue number | 16 |
Publication status | Published - 2003 |
Polyelectrolyte nanolayers as diffusion barriers for Cu metallization
P Ganesan, J Gamba, Amanda Ellis, R Kane, G Ramanath
Research output: Contribution to journal › Article › peer-review
31
Citations
(Scopus)