Polyelectrolyte nanolayers as diffusion barriers for Cu metallization

P Ganesan, J Gamba, Amanda Ellis, R Kane, G Ramanath

    Research output: Contribution to journalArticlepeer-review

    28 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)3302-3305
    Number of pages4
    JournalApplied Physics Letters
    Volume83
    Issue number16
    Publication statusPublished - 2003

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