Polyelectrolyte nanolayers as diffusion barriers for Cu metallization

P Ganesan, J Gamba, Amanda Ellis, R Kane, G Ramanath

Research output: Contribution to journal › Article › peer-review

31 Citations (Scopus)

Cite this

@article{11777f198f5541b58bed99c65dabff38,

title = "Polyelectrolyte nanolayers as diffusion barriers for Cu metallization",

author = "P Ganesan and J Gamba and Amanda Ellis and R Kane and G Ramanath",

year = "2003",

language = "English",

volume = "83",

pages = "3302--3305",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics",

number = "16",

}