| Original language | English |
|---|---|
| Pages (from-to) | 3302-3305 |
| Number of pages | 4 |
| Journal | Applied Physics Letters |
| Volume | 83 |
| Issue number | 16 |
| Publication status | Published - 2003 |
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Polyelectrolyte nanolayers as diffusion barriers for Cu metallization
- P Ganesan
- , J Gamba
- , Amanda Ellis
- , R Kane
- , G Ramanath
Research output: Contribution to journal › Article › peer-review
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