Practical Plasma Immersion Ion Implantation for Stress Regulation and Treatment of Insulators

M Bilek; David R McKenzie; R N Tarrant; T W H Oates; P Ruch; K Newton-McGee; Yang Shi; D Tompsett; H C Nguyen; B K Gan; D T  Kwok

doi:10.1002/ctpp.200410065

Practical Plasma Immersion Ion Implantation for Stress Regulation and Treatment of Insulators

M Bilek, David R McKenzie, R N Tarrant, T W H Oates, P Ruch, K Newton-McGee, Yang Shi, D Tompsett, H C Nguyen, B K Gan, D T Kwok

Research output: Contribution to journal › Article › peer-review

11 Citations (Scopus)

Abstract

Plasma immersion ion implantation has been attracting the interest of research groups around the world over the last two decades. The technique has been developed to the stage where it is a well-established technique for a number of materials processing applications, such as plasma nitriding. Recent research has focussed on developing the method for a range of new applications, including stress regulation and control of microstructure, as well as surface treatment of insulators. Recent developments in these technologically important applications are discussed in this paper.

Original language	English
Pages (from-to)	465-471
Number of pages	7
Journal	CONTRIBUTIONS TO PLASMA PHYSICS
Volume	44
Issue number	5-6
Early online date	31 Aug 2004
DOIs	https://doi.org/10.1002/ctpp.200410065
Publication status	Published - Sept 2004
Externally published	Yes

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AU - McKenzie, David R

AU - Tarrant, R N

AU - Oates, T W H

AU - Ruch, P

AU - Newton-McGee, K

AU - Shi, Yang

AU - Tompsett, D

AU - Nguyen, H C

AU - Gan, B K

AU - Kwok, D T

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AB - Plasma immersion ion implantation has been attracting the interest of research groups around the world over the last two decades. The technique has been developed to the stage where it is a well-established technique for a number of materials processing applications, such as plasma nitriding. Recent research has focussed on developing the method for a range of new applications, including stress regulation and control of microstructure, as well as surface treatment of insulators. Recent developments in these technologically important applications are discussed in this paper.

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JO - CONTRIBUTIONS TO PLASMA PHYSICS

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Practical Plasma Immersion Ion Implantation for Stress Regulation and Treatment of Insulators

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