Practical Plasma Immersion Ion Implantation for Stress Regulation and Treatment of Insulators

M Bilek, David R McKenzie, R N Tarrant, T W H Oates, P Ruch, K Newton-McGee, Yang Shi, D Tompsett, H C Nguyen, B K Gan, D T Kwok

Research output: Contribution to journal › Article › peer-review

11 Citations (Scopus)