Precision Alignment of Plates

Stephen L Buchwalter (Inventor), David Lewis (Inventor), Shui-Chih Alan Lien (Inventor), Sampath Purushothaman (Inventor), John J Ritsko (Inventor)

    Research output: Patent

    Abstract

    A system for aligning two plates, in accordance with the present invention, includes a first plate having a lithographically patterned structure formed on a first surface. A second plate also has a lithographically patterned structure formed on a second surface, the first and second surfaces being disposed to face each other. The patterned structures of the plates have corresponding and opposing edges to provide an interference fit between the patterned structures of the first and second plates wherein self-alignment between the first and second plates is realized by engaging the corresponding and opposing edges in the interference fit. A method for aligning two plates includes the steps of providing the system described above, coarsely aligning the plates in a first state which includes an interference between the patterned structures, adjusting at least one of plates to provide a second state having a clearance fit between the patterned structures and moving the plates together and returning to the first state to align the plates relative to each other.
    Original languageEnglish
    Patent numberUS6177975B1
    Filing date27/04/00
    Publication statusPublished - 23 Jan 2001

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