Abstract
Single-Walled Carbon Nanotubes are fluorinated within a Radio-Frequency Plasma Reactor using SF6 as a source gas. To develop an understanding of how varying experimental parameters affect the plasma, and hence the resultant modification of the nanotubes, a Langmuir Probe has been employed to study the plasma system. Information about plasma densities, electron temperatures, and the plasma potential is presented and discussed. An interesting oscillatory behavior within the plasma has also been observed and studied.
Original language | English |
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Pages | 120-123 |
Number of pages | 4 |
DOIs | |
Publication status | Published - 2010 |
Event | 2010 International Conference on Nanoscience and Nanotechnology (ICONN 2010) - Duration: 22 Feb 2010 → … |
Conference
Conference | 2010 International Conference on Nanoscience and Nanotechnology (ICONN 2010) |
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Period | 22/02/10 → … |
Keywords
- Carbon
- Fluorination
- Nanotube
- Plasma