Radio frequency SF6 plasma modified single-walled carbon nanotubes: Synchrotron spectroscopy and plasma characterisation studies

A Barlow, J Quinton

    Research output: Contribution to conferencePaperpeer-review

    3 Citations (Scopus)

    Abstract

    Single-Walled Carbon Nanotubes are fluorinated within a Radio-Frequency Plasma Reactor using SF6 as a source gas. To develop an understanding of how varying experimental parameters affect the plasma, and hence the resultant modification of the nanotubes, a Langmuir Probe has been employed to study the plasma system. Information about plasma densities, electron temperatures, and the plasma potential is presented and discussed. An interesting oscillatory behavior within the plasma has also been observed and studied.

    Original languageEnglish
    Pages120-123
    Number of pages4
    DOIs
    Publication statusPublished - 2010
    Event2010 International Conference on Nanoscience and Nanotechnology (ICONN 2010) -
    Duration: 22 Feb 2010 → …

    Conference

    Conference2010 International Conference on Nanoscience and Nanotechnology (ICONN 2010)
    Period22/02/10 → …

    Keywords

    • Carbon
    • Fluorination
    • Nanotube
    • Plasma

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