Reactive ion etching process of transition-metal oxide for resistance random access memory device

Fumiyoshi Takano, Hisashi Shima, Hidenobu Muramatsu, Yutaka Kokaze, Yutaka Nishioka, Koukou Suu, Hirofumi Kishi, Nelson Buntimil Arboleda, Melanie David, Tanglaw Roman, Hideaki Kasai, Hiro Akinaga

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13 Citations (Scopus)

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Engineering & Materials Science

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