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Reactive ion etching process of transition-metal oxide for resistance random access memory device

  • Fumiyoshi Takano
  • , Hisashi Shima
  • , Hidenobu Muramatsu
  • , Yutaka Kokaze
  • , Yutaka Nishioka
  • , Koukou Suu
  • , Hirofumi Kishi
  • , Nelson Buntimil Arboleda
  • , Melanie David
  • , Tanglaw Roman
  • , Hideaki Kasai
  • , Hiro Akinaga

Research output: Contribution to journal › Article › peer-review

14 Citations (Scopus)

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