Self-assembled subnanolayers as interfacial adhesion enhancers and diffusion barriers for integrated circuits

G Ramanath, G Cui, P Ganesan, X Guo, Amanda Ellis, M Stukowski, K Vijayamohanan, P Doppelt, M Lane

    Research output: Contribution to journalArticlepeer-review

    110 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)383-385
    Number of pages3
    JournalApplied Physics Letters
    Volume83
    Issue number2
    Publication statusPublished - 2003

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