Self-assembled subnanolayers as interfacial adhesion enhancers and diffusion barriers for integrated circuits

G Ramanath, G Cui, P Ganesan, X Guo, Amanda Ellis, M Stukowski, K Vijayamohanan, P Doppelt, M Lane

    Research output: Contribution to journalArticle

    105 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)383-385
    Number of pages3
    JournalApplied Physics Letters
    Volume83
    Issue number2
    Publication statusPublished - 2003

    Cite this

    Ramanath, G., Cui, G., Ganesan, P., Guo, X., Ellis, A., Stukowski, M., Vijayamohanan, K., Doppelt, P., & Lane, M. (2003). Self-assembled subnanolayers as interfacial adhesion enhancers and diffusion barriers for integrated circuits. Applied Physics Letters, 83(2), 383-385.