Self-assembled subnanolayers as interfacial adhesion enhancers and diffusion barriers for integrated circuits

G Ramanath, G Cui, P Ganesan, X Guo, Amanda Ellis, M Stukowski, K Vijayamohanan, P Doppelt, M Lane

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Cite this

@article{39cc38ec06d14015aa29368907a8c1c5,

title = "Self-assembled subnanolayers as interfacial adhesion enhancers and diffusion barriers for integrated circuits",

author = "G Ramanath and G Cui and P Ganesan and X Guo and Amanda Ellis and M Stukowski and K Vijayamohanan and P Doppelt and M Lane",

year = "2003",

language = "English",

volume = "83",

pages = "383--385",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics",

number = "2",

}

TY - JOUR

T1 - Self-assembled subnanolayers as interfacial adhesion enhancers and diffusion barriers for integrated circuits

AU - Ramanath, G

AU - Cui, G

AU - Ganesan, P

AU - Guo, X

AU - Ellis, Amanda

AU - Stukowski, M

AU - Vijayamohanan, K

AU - Doppelt, P

AU - Lane, M

PY - 2003

Y1 - 2003

M3 - Article

SN - 0003-6951

VL - 83

SP - 383

EP - 385

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 2

ER -