| Original language | English |
|---|---|
| Pages (from-to) | 135-152 |
| Number of pages | 18 |
| Journal | Plasmas and Polymers |
| Volume | 8 |
| Issue number | 2 |
| Publication status | Published - 2003 |
Self-organisation and dynamics of nanoparticles in chemically active plasmas for low-temperature deposition of silicon and carbon-based nanostructured films
S Vladimirov, K Ostrikov
Research output: Contribution to journal › Article › peer-review
10
Citations
(Scopus)