Self-organisation and dynamics of nanoparticles in chemically active plasmas for low-temperature deposition of silicon and carbon-based nanostructured films

S Vladimirov, K Ostrikov

    Research output: Contribution to journalArticle

    9 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)135-152
    Number of pages18
    JournalPlasmas and Polymers
    Volume8
    Issue number2
    Publication statusPublished - 2003

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