Stress relief and texture formation in aluminium nitride by plasma immersion ion implantation

B Gan, M Bilek, David McKenzie, Yang Shi, D Tompsett, M Taylor, D McCulloch

Research output: Contribution to specialist publicationArticle

21 Citations (Scopus)
Original languageEnglish
Pages1751-1760
Number of pages10
Volume16
No.10
Specialist publicationJournal of Physics: Condensed Matter
PublisherInstitute of Physics Publishing Ltd.
Publication statusPublished - 2004

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