Stress relief and texture formation in aluminium nitride by plasma immersion ion implantation

B Gan, M Bilek, David McKenzie, Yang Shi, D Tompsett, M Taylor, D McCulloch

Research output: Contribution to specialist publication › Article

22 Citations (Scopus)

Original language	English
Pages	1751-1760
Number of pages	10
Volume	16
No.	10
Specialist publication	Journal of Physics: Condensed Matter
Publisher	Institute of Physics Publishing Ltd.
Publication status	Published - 2004

Cite this

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title = "Stress relief and texture formation in aluminium nitride by plasma immersion ion implantation",

author = "B Gan and M Bilek and David McKenzie and Yang Shi and D Tompsett and M Taylor and D McCulloch",

year = "2004",

language = "English",

volume = "16",

pages = "1751--1760",

journal = "Journal of Physics: Condensed Matter",

publisher = "Institute of Physics Publishing Ltd.",

}

TY - GEN

T1 - Stress relief and texture formation in aluminium nitride by plasma immersion ion implantation

AU - Gan, B

AU - Bilek, M

AU - McKenzie, David

AU - Shi, Yang

AU - Tompsett, D

AU - Taylor, M

AU - McCulloch, D

PY - 2004

Y1 - 2004

M3 - Article

VL - 16

SP - 1751

EP - 1760

JO - Journal of Physics: Condensed Matter

JF - Journal of Physics: Condensed Matter

PB - Institute of Physics Publishing Ltd.

ER -