Original language | English |
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Pages | 1751-1760 |
Number of pages | 10 |
Volume | 16 |
No. | 10 |
Specialist publication | Journal of Physics: Condensed Matter |
Publisher | Institute of Physics Publishing Ltd. |
Publication status | Published - 2004 |
Stress relief and texture formation in aluminium nitride by plasma immersion ion implantation
B Gan, M Bilek, David McKenzie, Yang Shi, D Tompsett, M Taylor, D McCulloch
Research output: Contribution to specialist publication › Article
21
Citations
(Scopus)