Abstract
A range of ion scattering spectroscopy techniques have been developed over the last decades. These techniques are well known for measuring concentration depth profiles. The techniques use monoatomic projectiles with kinetic energies of the projectiles from the keV to MeV range and suit analyzing both the thickness and composition of thin coating films. Often rare gas projectiles are used but in general a large range of elements can be chosen. The energy loss of the projectiles serves to derive the depth information for all ion scattering techniques.
| Original language | English |
|---|---|
| Title of host publication | Encyclopedia of Solid-Liquid Interfaces |
| Subtitle of host publication | Volume 1- Experimental and Theoretical Methods |
| Editors | Klaus Wandelt, Gianlorenzo Bussetti, Gunther Andersson, David Starr, Hendrik Bluhm |
| Place of Publication | Amsterdam |
| Publisher | Elsevier |
| Pages | 336-345 |
| Number of pages | 10 |
| Volume | 1 |
| ISBN (Electronic) | 978-0-323-85670-6 |
| ISBN (Print) | 978-0-323-85669-0 |
| DOIs | |
| Publication status | Published - 2024 |
Keywords
- Composition
- Depth profiling
- Energy loss straggling
- Inorganic materials
- Ion scattering
- Organic materials
- Self-assembled monolayers
- Stopping power
- Thickness
- Thin films
- Time of flight analysis