Sub-nanometre metrology of optical wafers using an angle-scanned Fabry-Perot interferometer

John Arkwright, D Farrant, J Zhang

    Research output: Contribution to journalArticle

    11 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)114-119
    Number of pages6
    JournalOptics Express
    Volume14
    Issue number1
    Publication statusPublished - 2006

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