Sub-nanometre metrology of optical wafers using an angle-scanned Fabry-Perot interferometer

John Arkwright; D Farrant; J Zhang

Sub-nanometre metrology of optical wafers using an angle-scanned Fabry-Perot interferometer

John Arkwright, D Farrant, J Zhang

Research output: Contribution to journal › Article › peer-review

11 Citations (Scopus)

Original language	English
Pages (from-to)	114-119
Number of pages	6
Journal	Optics Express
Volume	14
Issue number	1
Publication status	Published - 2006

Cite this

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title = "Sub-nanometre metrology of optical wafers using an angle-scanned Fabry-Perot interferometer",

author = "John Arkwright and D Farrant and J Zhang",

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Sub-nanometre metrology of optical wafers using an angle-scanned Fabry-Perot interferometer

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