Abstract
Ex-situ aqueous (NH4)2S treated sulfur-passivated InP substrates have been studied using ultrahigh vacuum scanning tunnelling microscopy (STM) and low-energy electron diffraction (LEED). The morphology of the passivated surface was imaged after a mild sample annealing. The STM images of a surface exhibiting a good 1×1 LEED pattern show that the top layer of the sulfur-passivated surface is poorly ordered. A surface bilayer atomic step has been observed to be common on sulfur-passivated surfaces. The magnitude of the surface roughness for the passivated surfaces lies between 10 Å and 25 Å; this is much smaller than the roughness of InP(100) substrates prepared using previously published methods. After annealing the sample at ∼420°C, a (2×1) LEED pattern with split half-integer spots has been observed. The associated STM images show that these split half-integer diffraction beams correspond to regularly spaced domains with a width of ∼20-30 Å in the [011] direction. The surface roughness increases with annealing temperature; the surface corresponding to the best 2×1 LEED symmetry (annealing at ∼420°C) has a roughness double that of the 1×1 phase.
| Original language | English |
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| Pages (from-to) | 163-168 |
| Number of pages | 6 |
| Journal | Journal of Vacuum Science and Technology A |
| Volume | 16 |
| Issue number | 1 |
| DOIs | |
| Publication status | Published - 1 Jan 1998 |
| Externally published | Yes |