Ultrasensitive strain sensor enhanced by Bonded Light Emitting Diodes

Thanh Nguyen; Toan Dinh; Van Thanh Dau; Abu Riduan Md Foisal; Hung Nguyen; Hieu Vu; Tuan Anh Pham; Canh-Dung Tran; Tuan-Khoa Nguyen; Hoang-Phuong Phan; Nam-Trung Nguyen; Dzung Viet Dao

doi:10.1109/SENSORS47087.2021.9639603

Ultrasensitive strain sensor enhanced by Bonded Light Emitting Diodes

Thanh Nguyen, Toan Dinh, Van Thanh Dau, Abu Riduan Md Foisal, Hung Nguyen, Hieu Vu, Tuan Anh Pham, Canh-Dung Tran, Tuan-Khoa Nguyen, Hoang-Phuong Phan, Nam-Trung Nguyen, Dzung Viet Dao

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

Herein we report a strain sensor with SiC/Si heterostructure exhibiting performance enhanced toward ultra-sensitivity using a bonded pico-light-emitting-diode. First, a cantilever with SiC/Si heterostructure is fabricated, followed by bonding a pico-LED on the top of the cantilever. The lateral photovoltage and photocurrent, then, are investigated under different LED supply voltages. The lateral photovoltage and photocurrent are as high as 7.9 mV and 19.06 A, respectively, as the bonded LED is powered by a supply voltage of 6V. Finally, the performance of the strain sensor was investigated. When the bonded LED is OFF, the gauge factor (GF) of the strain sensor is 20.5. This GF significantly increases to 18, 000 when the bonded LED is ON, which is thousand-time modulation. In other word, the strain sensor with bonded LED has ultra-high sensitivity.

Original language	English
Title of host publication	2021 IEEE Sensors, SENSORS 2021 - Conference Proceedings
Publisher	Institute of Electrical and Electronics Engineers
Number of pages	4
ISBN (Electronic)	9781728195018
ISBN (Print)	9781728195025
DOIs	https://doi.org/10.1109/SENSORS47087.2021.9639603
Publication status	Published - 2021
Externally published	Yes
Event	20th IEEE Sensors, SENSORS 2021 - Virtual, Online, Australia Duration: 31 Oct 2021 → 4 Nov 2021

Publication series

Name	Proceedings of IEEE Sensors
Volume	2021-October
ISSN (Print)	1930-0395
ISSN (Electronic)	2168-9229

Conference

Conference	20th IEEE Sensors, SENSORS 2021
Country/Territory	Australia
City	Virtual, Online
Period	31/10/21 → 4/11/21

Keywords

Light Emitting Diodes
piezoresistive effect
strain sensor

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Nguyen, T., Dinh, T., Dau, V. T., Md Foisal, A. R., Nguyen, H., Vu, H., Pham, T. A., Tran, C.-D., Nguyen, T.-K., Phan, H.-P., Nguyen, N.-T., & Dao, D. V. (2021). Ultrasensitive strain sensor enhanced by Bonded Light Emitting Diodes. In 2021 IEEE Sensors, SENSORS 2021 - Conference Proceedings (Proceedings of IEEE Sensors; Vol. 2021-October). Institute of Electrical and Electronics Engineers. https://doi.org/10.1109/SENSORS47087.2021.9639603

@inproceedings{a37a948a9a8542f8aeaa2e90c7d020c0,

title = "Ultrasensitive strain sensor enhanced by Bonded Light Emitting Diodes",

abstract = "Herein we report a strain sensor with SiC/Si heterostructure exhibiting performance enhanced toward ultra-sensitivity using a bonded pico-light-emitting-diode. First, a cantilever with SiC/Si heterostructure is fabricated, followed by bonding a pico-LED on the top of the cantilever. The lateral photovoltage and photocurrent, then, are investigated under different LED supply voltages. The lateral photovoltage and photocurrent are as high as 7.9 mV and 19.06 A, respectively, as the bonded LED is powered by a supply voltage of 6V. Finally, the performance of the strain sensor was investigated. When the bonded LED is OFF, the gauge factor (GF) of the strain sensor is 20.5. This GF significantly increases to 18, 000 when the bonded LED is ON, which is thousand-time modulation. In other word, the strain sensor with bonded LED has ultra-high sensitivity.",

keywords = "Light Emitting Diodes, piezoresistive effect, strain sensor",

author = "Thanh Nguyen and Toan Dinh and Dau, {Van Thanh} and {Md Foisal}, {Abu Riduan} and Hung Nguyen and Hieu Vu and Pham, {Tuan Anh} and Canh-Dung Tran and Tuan-Khoa Nguyen and Hoang-Phuong Phan and Nam-Trung Nguyen and Dao, {Dzung Viet}",

year = "2021",

doi = "10.1109/SENSORS47087.2021.9639603",

language = "English",

isbn = "9781728195025",

series = "Proceedings of IEEE Sensors",

publisher = "Institute of Electrical and Electronics Engineers",

booktitle = "2021 IEEE Sensors, SENSORS 2021 - Conference Proceedings",

address = "United States",

note = "20th IEEE Sensors, SENSORS 2021 ; Conference date: 31-10-2021 Through 04-11-2021",

}

Nguyen, T, Dinh, T, Dau, VT, Md Foisal, AR, Nguyen, H, Vu, H, Pham, TA, Tran, C-D, Nguyen, T-K, Phan, H-P, Nguyen, N-T & Dao, DV 2021, Ultrasensitive strain sensor enhanced by Bonded Light Emitting Diodes. in 2021 IEEE Sensors, SENSORS 2021 - Conference Proceedings. Proceedings of IEEE Sensors, vol. 2021-October, Institute of Electrical and Electronics Engineers, 20th IEEE Sensors, SENSORS 2021, Virtual, Online, Australia, 31/10/21. https://doi.org/10.1109/SENSORS47087.2021.9639603

Ultrasensitive strain sensor enhanced by Bonded Light Emitting Diodes. / Nguyen, Thanh; Dinh, Toan; Dau, Van Thanh et al.
2021 IEEE Sensors, SENSORS 2021 - Conference Proceedings. Institute of Electrical and Electronics Engineers, 2021. (Proceedings of IEEE Sensors; Vol. 2021-October).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Ultrasensitive strain sensor enhanced by Bonded Light Emitting Diodes

AU - Nguyen, Thanh

AU - Dinh, Toan

AU - Dau, Van Thanh

AU - Md Foisal, Abu Riduan

AU - Nguyen, Hung

AU - Vu, Hieu

AU - Pham, Tuan Anh

AU - Tran, Canh-Dung

AU - Nguyen, Tuan-Khoa

AU - Phan, Hoang-Phuong

AU - Nguyen, Nam-Trung

AU - Dao, Dzung Viet

PY - 2021

Y1 - 2021

N2 - Herein we report a strain sensor with SiC/Si heterostructure exhibiting performance enhanced toward ultra-sensitivity using a bonded pico-light-emitting-diode. First, a cantilever with SiC/Si heterostructure is fabricated, followed by bonding a pico-LED on the top of the cantilever. The lateral photovoltage and photocurrent, then, are investigated under different LED supply voltages. The lateral photovoltage and photocurrent are as high as 7.9 mV and 19.06 A, respectively, as the bonded LED is powered by a supply voltage of 6V. Finally, the performance of the strain sensor was investigated. When the bonded LED is OFF, the gauge factor (GF) of the strain sensor is 20.5. This GF significantly increases to 18, 000 when the bonded LED is ON, which is thousand-time modulation. In other word, the strain sensor with bonded LED has ultra-high sensitivity.

AB - Herein we report a strain sensor with SiC/Si heterostructure exhibiting performance enhanced toward ultra-sensitivity using a bonded pico-light-emitting-diode. First, a cantilever with SiC/Si heterostructure is fabricated, followed by bonding a pico-LED on the top of the cantilever. The lateral photovoltage and photocurrent, then, are investigated under different LED supply voltages. The lateral photovoltage and photocurrent are as high as 7.9 mV and 19.06 A, respectively, as the bonded LED is powered by a supply voltage of 6V. Finally, the performance of the strain sensor was investigated. When the bonded LED is OFF, the gauge factor (GF) of the strain sensor is 20.5. This GF significantly increases to 18, 000 when the bonded LED is ON, which is thousand-time modulation. In other word, the strain sensor with bonded LED has ultra-high sensitivity.

KW - Light Emitting Diodes

KW - piezoresistive effect

KW - strain sensor

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UR - http://purl.org/au-research/grants/ARC/LP160101553

UR - http://purl.org/au-research/grants/ARC/DE210100852

U2 - 10.1109/SENSORS47087.2021.9639603

DO - 10.1109/SENSORS47087.2021.9639603

M3 - Conference contribution

AN - SCOPUS:85123643035

SN - 9781728195025

T3 - Proceedings of IEEE Sensors

BT - 2021 IEEE Sensors, SENSORS 2021 - Conference Proceedings

PB - Institute of Electrical and Electronics Engineers

T2 - 20th IEEE Sensors, SENSORS 2021

Y2 - 31 October 2021 through 4 November 2021

ER -

Ultrasensitive strain sensor enhanced by Bonded Light Emitting Diodes

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Keywords

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